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Introducing NEW PHI VersaProbe 4

Scanning XPS Microprobe

Improved spectroscopic performance

• High sensitivity in small and large area analysis using micro-focused, scanning X-ray source

NEW Large area imaging and mapping

• X-ray induced Secondary Electron Imaging (SXI) for large area navigation
• Large area chemical mapping

~ 25 x 2.5 mm SXI mosaic for selecting analysis locations with 100% certainty
~ 5 x 2.5 mm C1s (red) and Al 2p (blue) chemical map overlayed

High performance depth profiling

• Multiple ion gun options for a variety of organic, inorganic, and mixed materials
• Advanced software for thin film structure analysis

Reliable automation and remote operation

• Highly configurable queuing system for automated unattended analysis and maximum efficiency
• Fully remote operation and advanced remote diagnostics

Environmentally friendly modern configuration

• Efficient power consumption, faster pump-down and ergonomic design

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