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First VersaProbe 4 in the World

Since the introduction of PHI XPS, the series of VersaProbe has become the most popular XPS instrument in the world. Last fall, PHI launched the latest fourth-generation XPS: "PHI VersaProbe 4".
 

The PHI VersaProbe 4 features a newly designed analyzer that enables high sensitivity analysis from tiny to large areas. The unique micro focus scanning X-ray and SXI images can be used as sample navigation through SEM-like SXI images to achieve a 100% accurate definition of the micro-analysis position.
 

The world's first PHI VersaProbe 4 arrived in China on December 21, 2021. This system also included multiple optional functions on the base XPS. Due to the epidemic and the Chinese New Year holiday, the installation schedule was delayed. The installation ended up to start from early February and the acceptance eventually completed on 14 February this year, taking 2 weeks for the full instrument setup and hand-over training to the customers.
 

The upgrades and highlights of PHI VersaProbe 4:
1． Brand new appearance design
2． Greater sensitivity and resolution for large area analysis
3.    Extremely low detection limits
4.    Imaging large-area stitching
5.    Upgrade of software automation function

Installation by CoreTech Integrated Limited.