Article

Surface Analysis Spotlight: Wafer Die Navigation Capabilities

Educational Series

Accurate stage navigation capabilities play a critical role in locating nano-sized defect particles on semiconductor wafers. Here, we discuss the wafer die navigation software capabilities available on the PHI 710 Scanning Auger Nanoprobe. Defect particles analyzed by AES can be chemically characterized with accurate elemental quantification, high spatial resolution (8 nm) mapping, and nano-volume analysis via depth profiling.  

Wafer Die Navigation Capabilities on the PHI 710 Scanning Auger Nanoprobe